Technical Equipment of the Institute of Micro Production Technology
Thin Film Technology
- Atomic Layer Deposition (ALD)
- Evaporation Deposition - Leybold LAB500plus
- Galvanization Baths
- Ion Beam Etching - Commonwealth Scientific Corporation
- Cathode Sputtering
- Mask Aligner - SÜSS MicroTec MA/BA6
- Plasma Etching
- Plasma-Enhanced Chemical Vapor Deposition
- Deep Reactive Ion Etching (DRIE) - Oxford Instruments Plasmalab System 100
- Vacuum Oven
- Reactive ion beam etching – scia Mill 150
- Modular coating and structuring system - Scia Mini 100
Mechanical Micro Machining
- Chemical-Mechanical Polishing
- 5-Axis CNC-Milling Machine
- Lapping and Nano Grinding Machines
- Grinding and Polishing Machine QATM QPol 250 A2-ECO
- Dicing Machine - Disco DAC551, DAC-2SP
- Keyence Laser MD-U1000C
- Laser processing system - Lightfab 3D Printer M
Other Equipment
System Packaging
- 3D Printer
- Bonding
- Glass Soldering Furnace
- Laminator - Bungard RLM 419p
- Injection Moulding
- Vaccum Casting System - MK Technology MK Mini
Micro Tribology
Analytics
Technical Equipment of the Institute of Microelectronic Systems
Mixed-Signal Circuits Group (Prof. Bernhard Wicht)
Analog design environment
- Virtuoso Analog Design Environment (Cadence)
Analog laboratory
Architectures and Systems Group (Prof. Holger Blume)
Platforms for emulating complex hardware designs
- BEE4, Chip-IT
Platforms for the analysis of GPGPU-accelerated data processing (CUDA, OpenCL)
Hardware design environments
- Xilinx ISE, Altera Quartus, Synopsys Front End and Verification Tools, Cadence SoC
- Encounter, Tensilica Xtensa Xplorer (ASIP design environment)
Fully equipped electronics laboratory
- Logic analyzers, spectrum analyzer, audio analyzer
- SMD soldering station
- Assembly line
- PXI system (National Instruments)
Test vehicle for highly automated driving
- PANDA (photo)
3D video equipment

Technical Equipment of the Institute of Transport and Automation Technology
Wirebonder - Delvotec 5310/5330
- Gold Ball-Wedge-Bonding
- Aluminum Wedge-Wedge Bonding
Semi-automatic Wirebonder - fs-Bondtec 5310/5330
- Gold Ball-Wedge-Bonding
- Aluminum Wedge-Wedge Bonding
- Camera-alignment and full automatic program mode
Manual Fineplacer – Finetech
- Bare-Die or packaged placement and assembly system
- Tools for various component sizes
- Time-pressure dispensing for adhesives
- Coaxial camera alignment of components
Rework Station – Ersa HR600/2
- Assembly and disassembly of PCB-mounted components
Printing machine – Schläfli Challenger 173
- Rotative single printing unit machine
- Flexography and gravure printing available
- Hönle mercury vapour UV-curing
Printing machine – Schläfli Challenger 650
- Rotative multiple printing unit machine
- Fully automatic printing sequences
- Flexography and gravure printing available
- Cold lamination
- Slot-Die coating
- GEW mercury vapour UV-curing
Coating System Erichsen - Coatmaster 510
- Doctor-blading of liquids on various substrates
3D-Laser Marking – Keyence ML-Z9600 & Keyence MD-X2500
- Galvo-scanner based laser systems with 3-axis
- Marking, ablating and laser-sintering of 3D-surfaces
Lasercutter – Epilog Fusion
- Large scale substrate processing with CO2 and Fibre laser
Contact angle measurement system – OEG surftens
- Camera based measurement of surface energy of substrates and surface tension of liquids

Desktop-SEM – Hitachi FlexSEM
- Compact SEM for samples with diameter < 80mm
Optical attenuation measurement system – Thalheim Spezial Optics
- Hexapod-based alignment of samples
- Coaxial in- and output camera systems
- NA-measurement
- Beamprofiling
- Referenced attenuation of 639nm transmission with NA and diameter beam shaping
Rheometer – Anton Paar MCR302
- Viscosity measurement over temperature and shear rate variation
Bit Error Rate Testing System – BERT
- 500 Mbit/s – 4 Gbit/s optical BERT measurement of waveguides
- Self built, components: Frequency Generator, PRBS Generator, Bias Tees, fibre-coupled LD and PD at 850nm, Amplifiers, Attenuators and DSA Sampling Scope
Various microscopes and other analysis equipment
- See details at the ITA institute website or the Cluster of Excellence PhoenixD infrastructure website